Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopy
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چکیده
منابع مشابه
Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopy
Reduction in metal-oxide thin films has been suggested as the key mechanism responsible for forming conductive phases within solid-state memory devices, enabling their resistive switching capacity. The quantitative spatial identification of such conductive regions is a daunting task, particularly for metal-oxides capable of exhibiting multiple phases as in the case of TiOx. Here, we spatially r...
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ژورنال
عنوان ژورنال: Scientific Reports
سال: 2016
ISSN: 2045-2322
DOI: 10.1038/srep21525